SiMF MEMS Low-Pass Filter

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SiMF MEMS Low-Pass Filter

Product Description

Based on MEMS process
Frequency Range: 5GHz ~ 90GHz
Perfect Temperature Stability
Small Size
High Rejection
Low loss

SiMF MEMS Low-pass Filter provides the advantage of small size, low consumption, high rejection ratio, wide operation temperature range and perfect consistency. SiMF MEMS filter chip is based on a pair of high resistively silicon wafer AU-AU bonding. The inside cavity is formed by DRIE etching. Both top and bottom surface are metalized with gold for grounding. The I/O port is fed by CPW line.

Radar, Microwave Communication, Electronic Systems, Microwave Apparatus and Instruments, Satellite Communication, Microwave Guidance and Navigation

Operating Temperature: -55~+85ºC
Storaging Temperature: -55~+125ºC
CW Power: ≤ 3W
Electrical Frequency: 2~20GHz
Insertion≤ 1dB
Wave≤ 1dB
VSWR: 1.6
Impedance: 50Ω

1. Au bonding ribbon width=160um, thickness=12.5um, as short as possible
2. Recommended space between chip and cover: 1-3 mm
3. Low temperature assembly technology: 180ºCMax
4. The center RF strip line of CPW can be connected directly to the micro strip line of customer
5. Top surface bonded to Ground is helpful for high stop band rejection. 6. Underlay metal: Cova (Recommended)

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Mr. Pan Gen

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Last Login Date: Sep 18, 2017

Business Type: Manufacturer/Factory, Trading Company

Main Products: Automobile Sensor, Sensor, Gyroscope, Accelerometer, Filter, Air Flow Sensor